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STM7

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  • Überblick
  • Suggested Models
  • Operability
  • Height Measurement
  • Measurement Support System
  • Technische Angaben
  • Multimedia

Überblick

A Microscope that Measures Up to
Individual Needs

Whether samples are small or large, simple or complex, or measurements are being taken by a novice or an expert, the Olympus STM7 range features measuring microscopes tailored to fit your needs.

Experience STM7

STM7

Refined Optical Performance

The STM7 series uses the same UIS2 infinity-corrected optical system found in state-of-the-art optical microscopes.
As a result, observed images have high resolution and high contrast, with aberration thoroughly eliminated to help ensure highly accurate measurement in minute detail.

STM7-LF FEM analysis

STM7-LF FEM analysis

Reliable Measurements with a Stone Stage-Mounting Plate

To further improve measurement accuracy, the STM7 series uses a highly durable, vibration-resistant frame with a granite surface plate. This stability enables sub-micron level measurements with minimal error.

User-Friendly, High-Precision, 3-Axis Measurement

As modern manufacturing technology becomes increasingly miniaturized and precise, highly accurate measurements are even more essential—not only along the XY axis, but also along the Z-axis. Olympus responded by creating the first reflective active, confocal autofocus system.

User-Friendly, High-Precision, 3-Axis Measurement

STM7 calibrations

  • Calibration certificate issued by Olympus Corporation Test & Analysis Center, and authenticated by ILAC-MRA calibration accreditation agencies (JCSS, JAB).
  • Traceability systems vary depending on periods and countries/regions. The samples used in STM7 calibrations are calibrated in each country/region. Please ask Olympus for details.

Dependable Quality Based On a Strict Traceability System

The accuracy of Olympus’ measuring microscopes is controlled by a strict traceability system, and Olympus even offers traceable calibration at the time of installation.

Software Compatibility with Microsoft Office

Suggested Models

Reliable Modular Systems

Five configurations provide you with flexibility to choose the features that you need.

Manual Models

Motorized Models

STM7-SF

STM7-MF

STM7-LF

STM7-MFA

STM7-LFA

STM7-SF

STM7-MF

STM7-LF

STM7-MFA

STM7-LFA
STM7-CS100
Stage:  100 mm x 100 mm

STM7-CS200
Stage:  200 mm x 200 mm

STM7-CS300
Stage:  300 mm x 300 mm

STM7-CS200
Stage:  200 mm x 200 mm

STM7-CS300
Stage:  300 mm x 300 mm
STM7-CS100

STM7-CS200

STM7-CS300

STM7-CS200

STM7-CS300
See Specification Chart

STM7-SF STM7-MF STM7-LF STM7-MFA STM7-LFA
Z-axis focus Manual Manual Motorized
Standard BF or BF/DFBF or BF/DFBF or BF/DF
Option DIC POLDIC POLDIC POL
Measurement objectives
Brightfield
OptionOptionOption
Focus navigator
STM7-FN
OptionOptionOption
Autofocus unit
STM7-AF
- - Option
Measurement support software
STM7-BSW
OptionOptionOption
Measurement support software
(Multiple Image Alignment /MIA and extend Focus Image/EFI)
STM7-ASW-ME
OptionOptionOption

OBSERVATION METHOD

BF:  Brightfield
DF:  Darkfield
DIC:  Differential interference contrast
POL:  Polarized light

Option:  Option

Operability

Stages that Fit Your Samples

Common Problems

  • Short measurement stroke precludes the measurement of larger samples•Samples must be rotated because the X-axis measurement area is shorter than the Y-axis measurement area
  • Due to the narrow measurement range, it is impossible to line up large numbers of samples on the stage to measure them at the same time

STM7 Solutions

  • The STM7 features a 300 mm x 300 mm stage capable of measuring large samples, including 300 mm wafers and printed circuit boards.
  • The X- and Y-axis measurement areas are equally long, eliminating the need to rotate samples
  • Long measurement areas for both the X and Y-axis allow multiple samples to be lined up on the stage for more efficient measurement

Maximum Measurement Stroke 300 mm x 300 mm

Three stages are available, each with a different measurement stroke - 100 mm x 100 mm, 200 mm x 200 mm, and 300 mm x 300 mm. Whether your samples are large or small, we offer a stage that fits your application.

STM7-CS100

STM7-CS100
100 mm x 100 mm

STM7-CS200

STM7-CS200
200 mm x 200 mm

STM7-CS300

STM7-CS300
300 mm x 300 mm

Broad Range of Magnifications and Working Distances

Common Problems

  • Most conventional measuring microscopes only accept a measuring objective or metallurgical objective, limiting the observation options

STM7 Solutions

  • The STM7 meets the requirements of a wide variety of observations. It responds to your needs at both low and high magnifications, enables the measurement of uneven samples requiring ultra-long working distance objectives, and even offers a variety of observation methods

Measuring Objectives

The objectives’ very long working distance helps you be confident when focusing on samples with large peaks and troughs and minimizes the chance that the objective comes in contact with the sample.

Furthermore, their low-magnification capability enables wide areas to be observed in a single view.

Measuring Objectives

Sample

Brightfield image

Brightfield image

Darkfield image

Darkfield image

Metallurgical Objectives

Metallurgical objectives enable high-magnification, high resolution observation comparable to that of optical microscopes.

What’s more, these objectives can be used for brightfield, darkfield, and DIC observation.

Click here for details about UIS2 objective lenses

Revolutionary Control Unit Refines Usability

Common Problems

  • Additional functions require additional operational units. Operators can’t always locate the corresponding unit quickly, which significantly reduces measurement efficiency
  • Numerous operational units and their power supplies around the main unit occupy valuable working space

STM7 Solutions

  • Almost all measuring microscope operations can be efficiently completed on the nearest operational unit
  • The system requires only a single operational unit and power supply, regardless of how many functions are added, freeing up workspace

Controllers

With the STM7 series, a single controller makes it possible to perform virtually all measuring microscope operations, including use of readout reset, illumination control, focusing, and autofocus. For efficiency and convenience, the unit can be placed wherever you wish and operated easily with one hand.

For Manual Z-Axis Focusing Models: STM7-HS Hand Switch

For Manual Z-Axis Focusing Models: STM7-HS Hand Switch

For Motorized Z-Axis Focusing Models: STM7-MCZ Focus Controller

For Motorized Z-Axis Focusing Models: STM7-MCZ Focus Controller

Control Box

The power supply and transmission for each unit are combined in a single control box. This maximizes the workspace even when a range of optional functions, such as the focus navigator, are added.

Manual and Motorized Focus Options

Manual and motorized focus control options are available. Choose the model that addresses your needs in terms of samples and measurement content, regardless of stage size - all frames incorporate a linear scale for the Z-axis that enables 3-axis measurement.

Manual Z-Axis Focus Models

Manual Z-Axis Focus Models

Manual models offer excellent cost performance with familiar handle operation that enables rapid vertical movement for users who measure samples with a variety of heights.

Motorized Z-Axis Focus Models

Motorized Z-Axis Focus Models

The motorized unit improves operability and reduces handling fatigued caused by making repeated focus and height measurements. The coaxial knobs for coarse and fi ne movement offer a feeling similar to manual operation, while the models can also be equipped with an autofocus unit.

Automatic Light Intensity Adjustment
Improves Efficiency

Common Problems

  • Analog volume adjustment used by conventional measuring microscopes does not enable the quantitative assessment of light intensity, which can lead to variability in measured values as light intensity changes
  • With conventional measuring microscopes, light intensity may need to be adjusted every time the objective is switched—making for an inefficient workflow

STM7 Solutions

  • Observations and measurements can always be performed under the same conditions thanks to the microscope’s quantitative display of light intensity value
  • Illumination method and light intensity are automatically adjusted to the preset value when the objective is switched, whenever the light intensity manager is used in combination with a coded revolving nosepiece

Precisely Control Light Intensity Values with a Quantitative Digital Display

The STM7 series displays light intensity using quantitative digital display, enabling observations to be made under consistent illumination conditions.

Precisely Control Light Intensity Values with a Quantitative Digital Display

5X Intensity 50

5X Intensity 50

20X Intensity 70

20X Intensity 70

100X Intensity 120

100X Intensity 120

No More Manual Adjustments

The light intensity manager can be used with the coded revolving nosepiece configuration. The coded revolving nosepiece automatically detects when you change objectives. This allows the illumination method and light intensity to be registered for each objective and adjusted automatically during measurements when the objective is switched. Now, there is no need to manually adjust light intensity, which used to be required with every switch between magnifications.

Check Measurement Results and Equipment Status Fast with a Detachable Digital Readout

Common Problems

  • The need to check the operation status of equipment, such as illumination, or measured values on individual units makes overall operation cumbersome

STM7 Solutions

  • The STM7 series displays microscope status, such as illumination, together with measured values on an indicator display area, for easy checking at a glance

Fast, Visual Status Check

The indicator displays the device status and settings. The minimum X-, Y-, and Z-axis values can be switched between 0.1 μm and 1 μm, and the display units can be switched between mm, μm, inches and mil.

Digital readout attached to the frame

Digital readout attached to the frame

Digital readout placed on a desk

Digital readout placed on a desk

Detachable Digital Readout Enables Individual Preference and Placement

Whether attached to the frame or a desk, the placement of the detachable digital readout is up to the individual user. While standing to take measurements, it can be placed on the side of the frame at almost the same height as the site of observation for easy viewing. When operating from a sitting position, such as observation or measurements on a monitor using a digital camera or when using the motorized Z-axis focusing model, simply place the digital readout and hand controller on the desk.

Height Measurement

Faster, Simpler, More Accurate Height Measurement

Common Problems

  • When doing visual measurement, variations can arise in the height measurements between different operators. Furthermore, this measurement method is time-consuming and inefficient

STM7 Solutions

  • The STM7 focus navigation system reduces the operator subjectivity in height measurements. It also shortens the time required to perform height measurement to achieve greater efficiency

Simple, Precise Focusing System with Superior Repeatability

Olympus’ focus navigator delivers highly reproducible height measurement by projecting a pattern within the field of view and identifying vertical deviations. Slight errors can occur in height measurements taken with normal visual observation, even when focus appears to be sharp. The focus navigator, however, enables measurements to be made simply by matching up the marks, reducing operator subjectivity in measurement results.

Simple, Precise Focusing System with Superior Repeatability

Autofocus Advantage for Fast and Highly Accurate Height Measurement

Common Problems

  • During visual measurement, the results of height measurement can vary between different operators
  • Manual height measurement requires the operator to repeatedly move the stage and adjust the focus with the handle, making measurement time-consuming and inefficient
  • Focusing on minute objects, such as bonding wires, is difficult

STM7 Solutions

  • Using the autofocus unit, the measured value remains highly accurate regardless of the operator
  • In TRACK mode, the image is automatically and continually kept in focus, enabling efficient height measurement in minimal time. The same mode renders manual focusing unnecessary for XY measurements, resulting in greater efficiency
  • When a 100X objective is used, the laser spot diameter can be as small as 1 μm, permitting autofocus to be used locally, even on extremely minute objects

Dedicated Autofocus Unit:
Outstanding Reproducibility and Focusing Speed

The STM7 autofocus unit allows highly accurate height measurements to be made with minimal time, regardless of the level of operator experience. Use of the reflective active, confocal method provides a stable focal point independent of surface roughness or a slanting sample surface, while the small laser diameter enables the use of autofocus, even on minute objects, such as bonding wires.

One-Shot Mode

One-Shot Mode

Instantaneously takes autofocus from roughly focused to sharply focused at the center of the field of view.

TRACK Mode

TRACK Mode

The TRACK Mode provides autofocus that tracks the peaks and troughs of the sample, even if the stage is moved, keeping the image continually in focus. This advancement greatly improves the efficiency of Z-axis measurements by enabling observations to be made without taking your hands off the X and Y handles.

Measurement Support System

Measure Complex-Shaped Objects Accurately, Quickly, and Simply

Measurement Support System

The ability to clearly and easily see the output display component of measuring microscopes is essential. Olympus measurement software deliver complex measurements with greater accuracy. The software also enables the use of digital cameras.

Learn More about Measurement Support Software

Measurement Support System

Accessories that Widen the Range of Observation and Measurement

Coded Revolving Nosepiece

Combining a coded revolving nosepiece with a digital camera lets you display the objective magnification on-screen during observation and allows you to record that magnification. This convenient feature allows information on your sample and the objective’s magnification to be recorded at the same time when recording a sample.

Coded Revolving Nosepiece
STM7-FS/ Foot Switch

STM7-FS/ Foot Switch

Enables hands-free transmission of data, allowing operators to complete measurement without taking hands off the X and Y handles.

SZ-LW61/ White LED Illumination Unit

This light-weight, space-saving design model provides a long operating life and low power consumption. The cost-effective LED illumination unit is also free from the flickering and brightness fluctuation.

SZ-LW61/ White LED Illumination Unit
SZX2-ILR66+SZX-RHS/ LED Ring Illuminator + Manual Control Unit

SZX2-ILR66+SZX-RHS/ LED Ring Illuminator + Manual Control Unit

SZX-RHS manual control unit enables independent illumination of four-segments of the SZX2-ILR66 reflected LED ring illuminator, which provides clear images with high color temperature. The optimal illumination can be selected from 13 patterns.

Rotatable Stage

Enables easy parallel alignment of sample.

STM7-RS100 for STM7-CS100

STM7-RS100
for STM7-CS100
100 mm x 100 mm stage

STM7-RS200 for STM7-CS200

STM7-RS200
for STM7-CS200
200 mm x 200 mm stage

STM7-RS300 for STM7-CS300

STM7-RS300
for STM7-CS300
300 mm x 300 mm stage

Technische Angaben

SPECIFICATIONS OF STM7 (Manual Model)

Manual Model

Small stage Midsize stage Large stage
Microscope body

STM7-SF STM7-MF STM7-LF
Focus Vertical movement range 175 mm 145 mm
Maximum measurable height 120 mm (with measurement objective)
175 mm (with metallurgical objective)
90 mm (with measurement objective)
145 mm (with metallurgical objective) *1
Z-axis measurement resolution 0.1 um
Z-axis drive method Manual coaxial fine/coarse focusing knobs
Illumination LED illumination White: for reflected light illumination, green: for transmitted light illumination
Observation tube MM6-ETR-1-5 Erect image trinocular tube (100:0/0:100)
Eyepiece (F.N.22) MM6-OCC10X (with cross hairs) , MM6-OC10X
Objectives BF (Bright field) MM6C-KMAS
Illumination
U-5RES-ESD
Nosepiece
MPLFL5X,10X,LMPLFLN20X,50X,100X
Metallurgical objectives
BF (Brightfiels) /DF (Darkfield) MM6C-RLAS
Illumination
U-5BDRES-ESD
Nosepiece
LMPLFLN5XBD,10XBD,20XBD,50XBD,100XBD
Metallurgical objectives
LED unit White color (Reflected) MM6-ILW
Green color (Transmitted) MM6-ILG
Stage

STM7-CS100 STM7-CS200 STM7-CS300
Measuring range X-axis 100 mm, Y-axis 100 mm X-axis 200 mm, Y-axis 200 mm X-axis 300 mm, Y-axis 300 mm
Measurement accuracy
(L: measuring length)
(3+2L/100) μm (3+4L/200) μm (3+6L/300) μm
Accuracy assurance weight 6 kg 10 kg 15 kg
Counter

STM7-DI
Number of axes Three
Unit μm / mm / inch / mil
Minimum resolution 0.1 um
Control box STM7-CB
Hand switch STM7-HS
Focus controller -
Interface cable -
Anti-vibration plates - STM7-VI
Power cable UYCP
Dimensions (W x D x H) mm 466 x 583 x 651 606 x 762 x 651 804 x 1024 x 686
Weight (kg) 84 kg 152 kg 277 kg
Power consumption 100-120/220-240V - 50/60Hz
0.3A/0.2A
100-120/220-240V - 50/60Hz
0.3A/0.2A
100-120/220-240V - 50/60Hz
0.3A/0.2A

*1 When using the large frame STM7-LF/STM7-LFA, a specimen whose height is 100 mm or less can be placed at the position backward from the light axis by 180 mm or more.

OBJECTIVES WORKING DISTANCE

Objective 1X 3X 5X 10X 20X 50X 100X
Measuring objectives MM6-OB series 59.6 76.8 65.4 50.5 - - -
Metallurgical objectives MPLFLN series Brightfield - - 20.0 11.0 3.1 1.0 1.0
LMPLFLN series Long working distance - - 22.5 21.0 12.0 10.6 3.4
MPLFLN-BD series Brightfield/darkfield - - 12.0 6.5 3.0 1.0 1.0
LMPLFLN-BD series Brightfield/darkfield, long working distance - - 15.0 10.0 12.0 10.6 3.3

STM7-BSW SYSTEM REQUIREMENTS

Item
CPU Intel Core i3 Processors 3 GHz or more
Memory 4 GB or more
HD available space 100 GB or more hard disk space for installation SSD hard disk is recommended for high speed image acquisition
Graphic card Graphic card available for resolution 1980 x 1080 and 32 bit color
Drive DVD Drive
PC input device 2-button mouse (3-button mouse with a wheel is recommended), keyboard
Operating system Microsoft Windows 10 Pro (32 bit / 64 bit)
Web browser Internet Explorer 8.0
* Microsoft Office 2010/2013/2016 (32 bit) are also supported.

SPECIFICATIONS OF STM7 (Motorized Model)

Motorized Model

Midsize stage Large stage
Microscope body

STM7-MFA STM7-LFA
Focus Vertical movement range 175 mm 145 mm
Maximum measurable height 120 mm (with measurement objective)
175 mm (with metallurgical objective)
90 mm (with measurement objective)
145 mm (with metallurgical objective) *1
Z-axis measurement resolution 0.1 um
Z-axis drive method Motorized
  • FOCUS button: Coarse movement speed 8 mm/s (max.)
  • Fine/coarse focusing knob: Fine focusing speed can be selected from 4 values (800 μm, 400 μm, 100 μm, 50 μm)
Illumination LED illumination White: for reflected light illumination, green: for transmitted light illumination
Observation tube MM6-ETR-1-5 Erect image trinocular tube (100:0/0:100)
Eyepiece (F.N.22) MM6-OCC10X (with cross hairs) , MM6-OC10X
Objectives BF (Bright field) MM6C-KMAS
Illumination
U-5RES-ESD
Nosepiece
MPLFL5X,10X,LMPLFLN20X,50X,100X
Metallurgical objectives
BF (Brightfield) /DF (Darkfield) MM6C-RLAS
Illumination
U-5BDRES-ESD
Nosepiece
LMPLFLN5XBD,10XBD,20XBD,50XBD,100XBD
Metallurgical objectives
LED unit White color (reflected) MM6-ILW
Green color (Transmitted) MM6-ILG
Stage

STM7-CS200 STM7-CS300
Measuring range X-axis 200 mm, Y-axis 200 mm X-axis 300 mm, Y-axis 300 mm
Measurement accuracy
(L: measuring length)
(3+4L/200) μm (3+6L/300) μm
Accuracy assurance weight 10 kg 15 kg
Counter

STM7-DI
Number of axes Three
Unit μm / mm / inch / mil
Minimum resolution 0.1 um
Control box STM7-CBA
Hand switch -
Focus controller STM7-MCZ
Interface cable U-IFCBL200 U-IFCBL200
Anti-vibration plates STM7-VI
Power cable UYCP
Dimensions (W x D x H) mm 606 x 762 x 811 804 x 1024 x 844
Weight (kg) 159 kg 284 kg
Power consumption 00-120/220-240V  50/60Hz 0.6A/0.35A 100-120/220-240V  50/60Hz 0.6A/0.35A

*1 When using the large frame STM7-LF/STM7-LFA, a specimen whose height is 100 mm or less can be placed at the position backward from the light axis by 180 mm or more.

OPTION

Objectives Measurement objectives MM6-OB series
(1X /3X /5X /10X)
Focus navigator Focus navigator unit STM7-FN
Green LED unit MM6-ILG
Autofocus Autofocus unit STM7-AF
DIC U-DICR DIC slider for reflected light U-DICR
Software/Camera Measurement Support Software STM7-BSW
Camera Digital camera Low STM7-CU
Digital camera Middle DP22-CU
Digital camera High DP29-CU
TV adapter C-mount camera port tube with 0.5X lens U-TV0.5XC-3-8
C-mount camera port tube with 0.35X lens U-TV0.35XC-2-7
Rotatable stage For 100 x 100 mm STM7-RS100
For 200 x 200 mm STM7-RS200
For 300 x 300 mm STM7-RS300
ND filter ND filter (Transmittance 6%) U-25ND6
ND filter (Transmittance 25%) U-ND25
DIC DIC/Polarizer U-PO3
DIC/Analyzer U-AN360-3
Software MIA, EFI optional software STM7-ASW-ME
Foot switch STM7-FS
Power supply unit MM6-ILPS-2
Stage micrometer OB-M/OB-MM

Multimedia

Anwendungsbeispiele

Inspecting Medical Hypodermic Needles Using a Measuring Microscope
Measuring Microscopes – Precision and High Throughput in Manufacturing
Measuring the Edge Shape of Engine Inlet and Exhaust Valve Heads
Angle Measurement of Fuel Injection Nozzle and Needle Tip
Parts mounting position measurement of O2 sensor
Schleifenhöhenmessung beim Drahtbonden
Measuring the Height of Wafer Bumps
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STM7 Measuring Microscope
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When to Use a Measuring Microscope: And How to Further Enhance its Capabilities

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STM7 Measuring Microscope

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