Semiconductor & Flat Panel Display Inspection Microscopes

Olympus MX microscopes are developed with the concept to offer the highest efficiency for all our customers. MX microscopes ensure beneficial four levels, Fast start-up, Easy Operation, Failure analysis and expandability for users.

MX63 / MX63L

The MX 63 and MX63L microscope systems offer quality observations for 300 mm wafers at largest, flat panel displays, print circuit boards, and other large samples, featuring the versatile functions and ergonomic, user-friendly designs. The flexible module design provides optimal observation systems for diverse inspection purposes. By the combination with OLYMPUS Stream image analysis software, your inspection procedure from observation to report generation can be simplified and streamlined.

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AL120

The AL120 wafer handler series transfers both silicon and compound semiconductor wafers from the cassette to the microscope stage with enhanced capabilities and flexibility, while maintaining an ergonomic design.

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AL120-12

The AL120-12 wafer handler is compatible with both FOUP (Load Port) and FOSB, ideal for lower cost back-end inspection. The safe and ergonomic design maintain operator safety while effectively transferring wafers including thin and warped wafers.

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Camera and Software Solutions

Digital cameras to provide the high resolution and color fidelity are available. The Olympus total solution is tied together with advanced imaging software that provides integrated operation from basic image capture to image processing, measurement and report generation.

Stream Enterprise

Stream Enterprise software with integrated data management offers intelligent step-by-step workflows to acquire sharp, crisp images that are ready for quantitative measurements and professional reporting based on the latest standards.

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Digital Cameras for Microscopes

Olympus Digital Cameras are exclusively designed for Microscopes and become indispensable options nowadays. All cameras are confirmed their best digital imaging performance with Olympus Microscopes and Imaging Analysis Software systems.

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