Solution microscopie
Applications

IC Pattern on a Semiconductor Wafer

Darkfield is used for detecting minute scratches or flaws on a sample or inspecting samples with mirrored surfaces, such as wafers.

MIX illumination enables users to view both patterns and colors.

Darkfield

Darkfield

MIX (Brightfield + Darkfield)

MIX (Brightfield + Darkfield)

Fluorescence

Fluorescence

MIX (Fluorescence + Darkfield)

MIX (Fluorescence + Darkfield)

Photoresist Residue on a Semiconductor Wafer

Fluorescence is used for samples that emit light when illuminated with a specially designed filter cube. This is used to detect contamination and photoresist residue.

MIX illumination enables the observation of both the photoresist residue and IC pattern.

LCD Color Filter

This observation technique is suitable for transparent samples such as LCDs, plastics, and glass materials.

MIX illumination enables the observation of both the filter color and circuit pattern.

Transmitted Light

Transmitted Light

MIX (Transmitted Light + Brightfield)

MIX (Transmitted Light + Brightfield)

Brightfield

Brightfield

Differential Interference Contrast (DIC)

Differential Interference Contrast (DIC)

Spheroidal Graphite Cast Iron

DIC is an observation technique where the height of a sample is visible as a relief, similar to a 3D image with improved contrast; it is ideal for inspections of samples that have very minute height differences, including metallurgical structures and minerals.

Sericite

Differential interference contrast (DIC) is an observation technique where the height of a sample, normally not detectable in brightfield, is visible as a relief, similar to a 3D image with improved contrast. It is ideal for inspections of samples that have very minute height differences, including metallurgical structures and minerals.

Brightfield

Brightfield

Polarized Light

Polarized Light

Infrared (IR)

Infrared (IR)

Bonding Pads on a IC Pattern

IR is used to look for defects inside IC chips and other devices made with silicon on glass.

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