Laser Microscope Benefits

1. Sub-micron 3D observation/measurement

Observe steps in the nanometer range and measure height differences at the sub-micron level.

2. ISO25178-compliant surface roughness measurement

Measure surface roughness from linear to planar

3. Non-contact, nondestructive, and fast

No sample preparation required—simply place the sample on the stage and you're ready to measure.

Measurement performance guarantee tailored to your operating environment

Accuracy and repeatability guaranteed
The performance of a measuring tool is typically expressed using accuracy, which indicates how close a measurement value is to its true value, and repeatability, which indicates the degree of variation in repeated measurement values. We guarantee the accuracy and repeatability of the microscope based on a traceable system so that you can be confident in your measurement results.

Surface metrology beyond the field of view
The OLS5100 microscope incorporates a length measuring module in the motorized stage, and we guarantee the accuracy of the stitched image data. While previous laser microscopes stitched data based on pattern matching, the OLS5100 microscope adds the position information from the length measuring module to the pattern matching to provide highly reliable stitched data with guaranteed accuracy.

*Only for OLS5100-SAF/EAF

Comprehensive Analysis

Many analysis functions are available. The following is just an example, so please download the brochure or contact your Evident representative for details.

ISO25178 compliant areal roughness measurement

The OLS5100 microscope scans the sample surface with a 0.4 μm diameter laser beam, enabling it to easily measure the surface roughness of samples that cannot be measured with contact surface roughness gauges. The ability to simultaneously acquire the color image, laser image, and 3D shape data of a surface that can't be measured with a contact surface roughness gauge expands the scope of analysis.

Profile measurement/ Measurement assist tool

The profile measurement function displays the surface profile by arbitrarily drawing a measurement line on the position to be measured on an image. It also measures the step between any two arbitrary points, width, cross-sectional area, and radius. Unlike contact-based measuring tools, setting the measured positions is easy. The measurement lines and points can be checked on the image, so even a very small site can be measured accurately. With the Measurement assist tool, the point to be measured can be correctly specified using the highest, lowest, middle, and/or mean points. When a site is specified in the acquired data, the feature points are automatically extracted according to specified conditions.