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工业解决方案

显微镜解决方案
OLS5100

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  • Overview
  • Software
  • Specifications
  • Resources

Overview

LEXT™ OLS5100 3D Laser Scanning Microscope

Laser Microscope for Material Analysis

Smart Workflow, Faster Experiments

Built for failure analysis and material engineering research, the OLS5100 laser microscope combines exceptional measurement accuracy and optical performance with smart tools that make the microscope easy to use. Precisely measure shape and surface roughness at the submicron level quickly and efficiently to simplify your workflow with data you can trust.

Watch Video
3d microscope

Easier Material Engineering and Failure Analysis Experiments

The Smart Experiment Manager makes your submicron 3D observation and failure analysis experiment workflows simpler by automating previously time-consuming tasks.

  • Automatically creates your experiment plan
  • Autopopulates data to your experiment plan matrix, reducing the chance of input errors
  • Clear data trend visualization tools

Guaranteed Measurement Accuracy

LEXT microscope objectives deliver highly accurate measurement data. Paired with the Smart Lens Advisor, you can acquire accurate data you can be confident in.

  • Guaranteed measurement accuracy*
  • Renowned Olympus optics reduce aberration to capture the correct shape of your sample throughout the entire field of view
  • Smart Lens Advisor helps you choose the right objective lens for your roughness measurement
*The information, including guaranteed accuracy, on this web page is based on conditions set by Olympus.
industrial microscope objective lens

Easy Laser Scanning Microscopy

Using the microscope is easy for novice and experienced users thanks to thoughtfully designed software.

  • Acquire accurate data easily—put your sample on the stage and press the start button
  • Measurement performance guarantee tailored to your operating environment

Download the brochure now

to learn more about the OLS5100 laser microscope

Download

Software

Simple Material Engineering and Failure Analysis Experiment Management

Managing experiment conditions when testing new materials is complicated, so the OLS5100 laser microscope’s Smart Experiment Manager simplifies the process by automating key steps, such as creating the experiment plan.

  • Complete your measurement tasks up to 30% faster*
  • Scan plan is autopopulated with data as it’s acquired
  • Don’t waste time transcribing data—the software does it for you

*Compared with OLS5000

forensic engineering software
material science experiment matrix

Automatic Data Input

The software automatically adds values to your experiment plan matrix to minimize the chance of input errors. In just a couple of clicks, you can export your data to an Excel spreadsheet.

Easy Experiment Condition Data Organization

You can click on each cell in the experiment plan, and the software will automatically generate a file name that contains the evaluation conditions for easy record keeping. Each file contains the associated images and data.

material science experiment conditions
failure analysis 3D imaging

Comprehensive Data Capture

The microscope scans your sample according to the experiment plan generated by the software so you know you’re not missing data or redoing work.

Find Data Problems Easily

A color map helps you understand your experiment data and verify that no data are missing and there are no errors. If there’s a problem, you can find and fix it earlier in the process.

material science data visualization
objective lens selector

Choose the Right Objective Lens

The Smart Lens Advisor helps you choose the right objective lens for your surface roughness measurement application. Enter some basic information—such as the field of view and the lens you want to use—and the Advisor will tell you how suitable it is for the application.

Easy Data Acquisition

Experienced and novice users alike can acquire data quickly and easily with the Smart Scan II feature. Place the sample on the stage, press the start button, and the microscope does the rest.

materials engineering data acquisition

Download the brochure now

to learn more about the OLS5100 laser microscope

Download

Specifications

Main unit

Model OLS5100-SAF OLS5100-SMF OLS5100-LAF OLS5100-EAF
Total magnification

54x–17,280x

Field of view

16 µm–5,120 µm

Measurement principle Optical system Reflection-type confocal laser scanning laser microscope
Reflection-type confocal laser scanning laser-DIC microscope
Color
Color-DIC
Measurement principle Light receiving element Laser: Photomultiplier (2 channels)
Color: CMOS color camera
Height measurement Display resolution 0.5 nm
Height measurement Dynamic range 16 bits
Height measurement Repeatability σn-1*1 *2 *5 5X:0.45 μm, 10X:0.1 μm, 20X : 0.03 μm, 50X : 0.012 μm, 100X : 0.012 μm
Height measurement Accuracy *1 *3 *5 0.15+L/100 μm (L:Measuring length[μm])
Height measurement Accuracy for stitched image *1 *3 *5 10X:5.0+L/100 μm, 20X or higher : 1.0+L/100 μm (L: Stitching length [μm])
Height measurement Measurement noise (Sq noise) *1 *4 *5 1 nm (Type)
Width measurement Display resolution 1 nm
Width measurement Repeatability 3σn-1  *1 *2 *5 

5X: 0.45 µm, 10X: 0.1 µm, 20X: 0.03 µm, 50X: 0.012 µm, 100X: 0.012 µm

Width measurement Accuracy *1 *3 *5 Measurement value +/- 1.5%
Width measurement Accuracy for stitched image *1 *3 *5 10X : 24+0.5L μm, 20X : 15+0.5L μm, 50X : 9+0.5L μm, 100X : 7+0.5L μm (L: Stitching length [mm])
Maximum number of measuring points in a single measurement

4096 × 4096 pixels

Maximum number of measuring points

36-megapixels

XY stage configuration Length measurement module • NA NA •
XY stage configuration Operating range

100 × 100 mm (3.9 × 3.9 in.) Motorized

100 × 100 mm (3.9 × 3.9 in.) Manual

300 × 300 mm (11.8 × 11.8 in.) Motorized

100 × 100 mm (3.9 × 3.9 in.) Motorized

Maximum sample height

100 × 100 mm (3.9 × 3.9 in.)

30 mm (1.2 in.)

30 mm (1.2 in.)

210 mm (8.3 in.)

Laser light source Wavelength 405 nm
Laser light source Maximum output 0.95 mW
Laser light source Laser class Class 2 (IEC60825-1:2007, IEC60825-1:2014)
Color light source White LED
Electrical power 240 W 240 W 278 W 240 W
Mass Microscope body Approx. 31 kg (68.3 lb) Approx. 32 kg (70.5 lb) Approx. 50 kg (110.2 lb) Approx. 43 kg (94.8 lb)
Mass Control box Approx. 12 kg (26.5 lb)

*1 Guaranteed when used in constant temperature and constant-temperature environment (temperature: 20˚C±1˚C, humidity: 50%±10%) specified in ISO554(1976), JIS Z-8703(1983).
*2 For 20x or higher, when measured with MPLAPON LEXT series objectives.
*3 When measured with dedicated LEXT objective.
*4 Typical value when measured with MPLAPON100XLEXT objective, and may differ from the guaranteed value.
*5 Guaranteed under Olympus Certificate System.

** The OS license of Window 10 has been certified for the microscope controller provided by olympus. Therefore, Microsoft's license terms are applied and you agree to the terms.Please refer to the following for Microsoft license terms.
https://www.microsoft.com/en-us/Useterms/Retail/Windows/10/UseTerms_Retail_Windows_10_english.htm


Objectives

Series Model Numerical Aperture (NA) Working Distance (WD) (mm)
UIS2 objective lens MPLFLN2.5x 0.08 10.7
MPLFLN5x 0.15 20

Dedicated LEXT objective lens (10X)

MPLFLN10xLEXT 0.3 10.4

Dedicated LEXT objective lens (high-performance type)

MPLAPON20xLEXT 0.6 1
MPLAPON50xLEXT 0.95 0.35
MPLAPON100xLEXT 0.95 0.35

Dedicated LEXT objective lens (long working distance type)

LMPLFLN20xLEXT 0.45 6.5
LMPLFLN50xLEXT 0.6 5.2
LMPLFLN100xLEXT 0.8 3.4
Super long working distance lens SLMPLN20x 0.25 25
SLMPLN50x 0.35 18
SLMPLN100x 0.6 7.6
Long working distance for LCD lens LCPLFLN20xLCD 0.45 8.3-7.4
LCPLFLN50xLCD 0.7 3.0-2.2
LCPLFLN100xLCD 0.85 1.2-0.9

Application software

Standard software OLS51-BSW
Standard software Data acquisition app Analysis app (simple analysis)
Motorized stage package application*1 OLS50-S-MSP
Advanced analysis application*2 OLS50-S-AA
Film thickness measurement application OLS50-S-FT
Auto edge measurement application OLS50-S-ED
Particle analysis application OLS50-S-PA
Experimental total assist application OLS51-S-ETA 
Sphere/cylinder surface angle analysis application OLS50-S-SA 

*1 Including auto-stitching data acquisition and multi-area data acquisition functions.
*2 Including Profile analysis, Difference analysis, Step-height analysis, Surface analysis, Area/volume analysis, Line roughness analysis, Area roughness analysis and Histogram analysis.


Olympus Laser Microscopes

OLS5000-SAF Setup Example

OLS5100-SAF Setup Example

OLS5100-SAF

  • 100 mm motorized stage
  • Max. height of sample: 100 mm (3.9 in.)

OLS5000-SAF

OLS5000-SAF - Dimention

OLS5100-EAF

  • 100 mm motorized stage
  • Max. height of sample: 210 mm (8.3 in.)

OLS5000-EAF

OLS5000-EAF - Dimention

OLS5100-SMF

  • 100 mm motorized stage
  • Max. height of sample: 40 mm (1.6 in.)

OLS5000-SMF

OLS5000-SMF - Dimention

OLS5100-LAF

  • 300 mm motorized stage
  • Max. height of sample: 37 mm (1.5 in.)

OLS5000-LAF

OLS5000-LAF  - Dimention

Control unit

PC & Control Unit - Dimention

Resources

应用注释

Laser Groove Profiling in Semiconductor Wafers Using the OLS5000 Laser Confocal Microscope
Precisely Measuring the Steep Gradient of a Miniature Bearing for a Rotating Dental Drill
Evaluating the Anti-Glare Property of a Speedometer Cover with High Precision Using a Laser Scanning 3D Microscope
使用激光扫描共聚焦显微镜测量医用注射针的表面粗糙度
High-precision three-dimensional measurement : Measuring the shape of microchannels with a 3D laser microscope (Japanese only)
Inspecting the Cavity Profile of Xenon Difluoride (XeF2) Etched Silicon (Si) Wafers for Suspended Antenna-Coupled Nanothermocouples
环保汽车齿面的粗糙度测量
测量键合引线球状端部的轮廓
测量感光耐蚀膜的厚度
集成电路微型凸块高度的测量
Measuring the shape of scratches on vehicle-mounted camera lenses
测量医用导管内壁的粗糙度
Measuring the shape of an automotive millimeter-wave radar’s circuit board
Measuring the Layer Profiles of Thin-Film Solid-State Lithium-Ion Batteries Manufactured Using the Inkjet Technique
测量引线框晶片垫的表面粗糙度
Measuring the Roughness of Lithium-Ion Battery Electrodes Using a Laser Microscope
测量锂离子电池电极集电器的表面粗糙度
凸轮轴的凸轮凸角的表面粗糙度测量
使用激光显微镜进行的引擎阀门的粗糙度测量
Headlamp Lens Waviness Measurement Using a Laser Microscope
Observation and measurement of profile changes in wiper blades using a laser microscope
使用激光显微镜进行油封表面轮廓测量
Measurement of the inner wall waviness and roughness of a turbocharger housing using a laser microscope
Evaluating the Roughness of Raceway Grooves in the Inner and Outer Rings of a Ball Bearing
Evaluating the shape of plastic bottle drinking spouts
Inner/outer wall roughness of a metal tube
Evaluating the Oil Groove Configuration of the Big End of Connecting Rods
Evaluation of Oil Grooves on the Sides of Pistons
Evaluation of the Inner Surface of Cylinder Liners
评估饮水口的塑料瓶盖上的通风孔的形状
评估存储卡的表面粗糙度
使用LEXT OLS5000激光显微镜对汽车车门开关压花进行3D评估
Evaluating the Internal Roughness of Injector Nozzles
Roughness Evaluation of the Side Surface of Piston Rings
金属加工制品上的毛刺
High-definition observation of the metal structure of materials for thermal power plant piping
咖啡奶油单份容器的表面粗糙度
拉链塑料袋紧固件滑轨的表面粗糙度
使用激光扫描数码显微镜进行钢板表面织构形貌分析
Measuring the volume of adhesive drops
纸盒穿孔尺寸测量
电容器压纹载带尺寸测量
Step measurement of transparent film applied to a glass surface
Inspection of the processed shape of expanded metal
通过使用激光显微镜进行灰度掩模/非接触式三维表面轮廓测量对光掩模透镜阵列进行形状评价
Inspection in the MEMS Manufacturing Process/3D shape measurement of a micron-sized area using a laser microscope
Evaluation of razor blade edges/Micro shape measurement using a laser microscope
Evaluating the Coating on a Smartphone Housing / Film thickness measurement and 3D surface profile measurement using a laser microscope
Roughness Evaluation of the Inner Lead of a Lead Frame / Surface roughness measurement of a micro area using a laser microscope
使用激光显微镜进行金属表面标记形状评价/三维形状测量
不锈钢的表面粗糙度测量/使用激光显微镜测量微型表面粗糙度
Ripple Marks Formed in Die-Casting / 3D shape measurement using a laser microscope
Surface Observation of Various Fibers for Fabrics/ 3D shape observation of a micro area using a laser microscope
LCD扩散板的表面轮廓评估/使用激光显微镜进行非接触式三维形状测量
纺织机械陶瓷零件的表面粗糙度/使用激光显微镜进行微米级尺寸区域的表面粗糙度测量。
垫片环的表面轮廓评估/使用激光显微镜进行非接触式三维形状测量
Evaluating the surface profile (roughness) of coated abrasives / Non-contact 3D shape measurement using a laser microscope
LCD导光板的表面轮廓/使用激光显微镜进行非接触式三维形状测量
热喷涂的表面轮廓评估/使用激光显微镜进行表面粗糙度测量
使用激光显微镜进行螺钉形状和表面粗糙度测量/表面粗糙度测量
喷墨打印纸和普通纸的表面观察: 使用激光显微镜进行非接触式3D剖面评估
Quality management in working with extra-fine tubes / Surface roughness analysis of a micro area using a laser microscope
Quantitative Investigations of the Interconnect
Looking towards a Future of Affordable Solar Energy
Studying the Electro-mechanical Behavior of Thin Films
使用奥林巴斯OLS4100激光扫描共聚焦显微镜进行柔性印制基板的表面粗糙度测量
Evaluating the Contacting Terminals of Wafer Level Chip Size Packages (CSPs) using the Olympus OLS4100 Laser Confocal Microscope
使用奥林巴斯OLS5000激光共聚焦显微镜测量激光切割应用中的渣滓
使用奥林巴斯的OLS5000激光共聚焦显微镜测量滚珠轴承的表面粗糙度
使用奥林巴斯OLS5000激光共聚焦显微镜测量牙植入物金属部分的表面粗糙度
使用奥林巴斯OLS5000激光扫描共聚焦显微镜进行的滑动金属表面的粗糙度测量
使用奥林巴斯OLS5000激光共聚焦显微镜测量印制电路板的表面粗糙度
使用奥林巴斯OLS5000激光共聚焦显微镜对立方氮化硼(CBN)尖头工具进行耐磨性评估
使用奥林巴斯OLS5000激光共聚焦显微镜对金刚石电沉积工具进行3D形状评估
Sectioning Analysis for Ball Grid Array (BGA) Surface Mounting of Semiconductor Package using the Olympus OLS5000 Laser Confocal Microscope
Setting standards in optical metrology at the PTB
Multi-Scale Analysis: Evaluating Measured Topographies on Surfaces Made by Additive Manufacturing (3D Printing)
Quantifying Microwear: The Effectiveness of LSCM and ReIA for Surface Roughness Analysis of Experimental Mistassini Quartzite Scrapers
用于替代能源的替代材料
Gaining the Edge: The Design and Development of a Device Equipped to Create 3D Ski Edge Measurements
Maximizing Data Recovery: Utilizing 3D Digital Laser Microscopy to Image Damaged Optical Media
Evaluating New Methods of Dental Erosion Analysis
The future of industrial quality control
Evaluating Sample Preparation of Stone Tools: Effects of Cleaning on Surface Measurements
Quilt Packaging: Lining Up an Array of Opportunities
Robot Insect Wings
 显示更多

视频

OLS5100介绍视频
OLS5100 Experiment Total Assist
OLS5100 Simple Analysis
OLS5100 Smart Scan II
OLS5100 Continuous Autofocus
OLS5100 Real-time Macro Mapping
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幻灯片分享

Utilizing 3D Digital Laser Microscopy to Image Damaged Optical Media
Evaluating the Sharpness of Ski Edges with Laser Microscopy
Preserving a Legend - Industrial Microscopy and Artifact Conservation at the Walt Disney Family Museum
Using RTI and 3D Laser Scanning Confocal Microscopy to Evaluate Relief and Contour Lines on Ancient Attic Greek Vases
 显示更多

在线研讨会

5 Things You Need to Know About Surface Metrology

白皮书

使用LEXT激光扫描显微镜完成粗糙度测量
激光扫描显微镜的基本原理

常见问题

学习工业显微镜

产品信息说明册

LEXT OLS5100 Brochure

解决方案

金属工业检测解决方案
风力涡轮机的检测解决方案
腐蚀检测解决方案
复合材料检测解决方案
测量解决方案
 显示更多

个案分析

案例研究:快速准确地检测表面的划痕 - LEXT OLS5000在克罗达公司大显身手

书籍

Advanced Optical Metrology - Additive Manufacturing
LEXT OLS5000 表面粗糙度测量介绍

博客

Surface Roughness Measurement: Practical Tips to Get Started
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