概述
LEXT™ OLS5100 3D激光扫描显微镜
用于材料分析的激光显微镜
更智能的工作流程,更快速的实验设计
适用于故障分析和材料工程研究的OLS5100激光显微镜将卓越的测量精度和光学性能与智能工具相结合,让显微镜更加方便使用。通过快速高效精确测量亚微米级形状和表面粗糙度的可靠数据简化您的工作流程。
观看视频
简化材料工程和失效分析实验智能实验管理助手能够自动执行此前需要耗费大量时间的任务,让您对亚微米的3D观察和失效分析工作流程更加简单。
|
保证测量准确度
LEXT显微镜物镜可提供高度准确的测量数据。与智能物镜选择助手(Smart Lens Advisor)搭配使用,就可获得可靠的高精度数据。
- 有保证的测量准确度*
- 奥林巴斯享誉世界的光学器件能够以更低像差在整个视场中捕捉样品的真实形貌
- 智能物镜选择助手(Smart Lens Advisor)还可帮助您选择合适的物镜进行粗糙度测量

轻松的激光扫描显微观察精心设计的软件让新手和经验丰富的用户都能够轻松使用显微镜。
|

Benefits
Laser Microscope Benefits | ||
1. Sub-micron 3D observation/measurement ![]() Observe steps in the nanometer range and measure height differences at the sub-micron level. | ||
2. ISO25178-compliant surface roughness measurement ![]() Measure surface roughness from linear to planar | ||
3. Non-contact, nondestructive, and fast ![]() No sample preparation required—simply place the sample on the stage and you're ready to measure. |
Reliable Data at the Push of a ButtonSmart Scan II Experienced and novice users alike can acquire data quickly and easily with the Smart Scan II feature. Place the sample on the stage, press the start button, and the microscope does the rest.
| ![]() |
Measurement performance guarantee tailored to your operating environment | |
![]() | Accuracy and repeatability guaranteed |
![]() | Surface metrology beyond the field of view *Only for OLS5100-SAF/EAF |
User-Friendly High-Resolution/High-Magnification Observation | ||
Continuous auto focus The microscope’s continuous autofocus keeps your images in focus when moving the stage or changing objectives, minimizing the need for manual adjustments. Permanent focus tracking enables you to perform observations quickly and easily. | ![]() | ![]() |
Dual DIC for nano-scale, real-time observation Detect minute damage in your sample with real-time, nanometerscale observation. Differential interference contrast (DIC) observation enables you to visualize nanometer-scale surface contours that are normally beyond the resolving power of a laser microscope. With DIC laser mode, the OLS5100 microscope can obtain live images comparable to those of an electron microscope, even when using a 5x or 10x low-power objective. | Back surface of wafer | Hard disk landing zone |
Comprehensive AnalysisMany analysis functions are available. The following is just an example, so please download the brochure or contact your Evident representative for details. | |
![]() | ISO25178 compliant areal roughness measurement The OLS5100 microscope scans the sample surface with a 0.4 μm diameter laser beam, enabling it to easily measure the surface roughness of samples that cannot be measured with contact surface roughness gauges. The ability to simultaneously acquire the color image, laser image, and 3D shape data of a surface that can't be measured with a contact surface roughness gauge expands the scope of analysis. |
![]() Measurement of the step between the highest and lowest points in a surface profile | Profile measurement/ Measurement assist tool The profile measurement function displays the surface profile by arbitrarily drawing a measurement line on the position to be measured on an image. It also measures the step between any two arbitrary points, width, cross-sectional area, and radius. Unlike contact-based measuring tools, setting the measured positions is easy. The measurement lines and points can be checked on the image, so even a very small site can be measured accurately. With the Measurement assist tool, the point to be measured can be correctly specified using the highest, lowest, middle, and/or mean points. When a site is specified in the acquired data, the feature points are automatically extracted according to specified conditions. |
![]() |
软件
简化材料工程与失效分析实验管理
测试新材料时的实验条件管理具有复杂性,OLS5100激光显微镜的智能实验管理助手(Smart Experiment Manager)可通过关键步骤(如创建实验计划)自动化简化这一过程。
- 提升30%的速度加快完成测量任务 *
- 扫描计划随数据采集自动生成
- 无需花费时间转录数据,软件为您自动完成
*与OLS5000相比
简捷的实验条件数据管理
通过点击实验计划中的每个单元格,软件即可自动生成包含评估条件的文件名,从而方便保存记录。每个文件均包含相关联的图像和数据。


选择合适的物镜
智能物镜选择助手(Smart Lens Advisor)还可帮助您为粗糙度测量应用选择合适的物镜只需选择合适的物镜,再点击开始,智能物镜选择助手(Smart Lens Advisor)就会告诉您该物镜的推荐程度。
轻松的数据采集
经验丰富的用户和新手均可以利用Smart Scan II功能快速轻松获取数据。将样品放在载物台上,按下“启动”按钮,显微镜即可自动完成其余操作。


技术参数
主机
型号 | OLS5100-SAF | OLS5100-SMF | OLS5100-LAF | OLS5100-EAF | ||
---|---|---|---|---|---|---|
总倍率 | 54x–17,280x | |||||
视场 | 16 µm–5,120 µm | |||||
测量原理 | 光学系统 |
反射式共焦激光扫描激光显微镜
反射式共焦激光扫描激光-DIC显微镜 颜色 彩色DIC | ||||
测量原理 | 光接收元件 |
激光:光电倍增管(2通道)
彩色:CMOS彩色相机 | ||||
高度测量 | 显示分辨率 | 0.5 nm | ||||
高度测量 | 动态范围 | 16位 | ||||
高度测量 | 重复性σn -1*1 *2 *5 | 5X:0.45 μm, 10X:0.1 μm, 20X:0.03 μm, 50X:0.012 μm, 100X:0.012 μm | ||||
高度测量 | 准确度*1 *3 *5 | 0.15 + L / 100μm(L:测量长度[μm]) | ||||
高度测量 | 拼接图像准确度*1 *3 *5 | 10X:5.0+L/100 μm, 20X 或更高倍率1.0+L/100 μm (L: 拼接长度[μm]) | ||||
高度测量 | 测量噪声(Sq噪声)*1 *4 *5 | 1 nm(典型值) | ||||
宽度测量 | 显示分辨率 | 1 nm | ||||
宽度测量 | 重复性3σn-1 *1 *2 *5 | 5X:0.4 μm, 10X:0.2 μm, 20X:0.05 μm, 50X:0.04 μm, 100X:0.02 μm | ||||
宽度测量 | 准确度*1 *3 *5 | 测量值+/- 1.5% | ||||
宽度测量 | 拼接图像准确度*1 *3 *5 | 10X:24+0.5L μm, 20X:15+0.5L μm, 50X:9+0.5L μm, 100X:7+0.5L μm (L:拼接长度[mm]) | ||||
单次测量时最大测量点数量 | 4096 × 4096像素 | |||||
最大测量点数量 | 3600万像素 | |||||
XY载物台配置 | 长度测量模块 | • | 不适用 | 不适用 | • | |
XY载物台配置 | 工作范围 | 100 × 100 mm (3.9 × 3.9 in.) 电动 | 100 × 100 mm (3.9 × 3.9 in.) 手动 | 300 × 300 mm (11.8 × 11.8 in.) 电动 | 100 × 100 mm (3.9 × 3.9 in.) 电动 | |
最大样品高度 | 100 × 100 mm (3.9 × 3.9 in.) | 30 mm (1.2 in.) | 30 mm (1.2 in.) | 210 mm (8.3 in.) | ||
激光光源 | 波长 | 405 nm | ||||
激光光源 | 最大输出 | 0.95 mW | ||||
激光光源 | 激光等级 | 2级(IEC60825-1:2007,IEC60825-1:2014) | ||||
彩色光源 | 白光LED | |||||
电气功率 | 240 W | 240 W | 278 W | 240 W | ||
质量 | 显微镜主体 | 约 31 kg | 约 32 kg | 约 50 kg | 约 43 kg | |
质量 | 控制箱 | 约 12 kg |
*1 在ISO554(1976)、JIS Z-8703(1983)规定的恒温恒湿环境下使用时提供保证(温度:20?C±1?C,湿度:50%±10%),如ISO554(1976)、JIS Z-8703(1983)所规定。
*2 在使用MPLAPON LEXT系列物镜测量时倍率20x或更高。
*3 在使用专用LEXT物镜测量时。
*4使用MPLAPON100XLEXT物镜测量时的典型值。
*5 基于奥林巴斯认证系统下的保证。
** Window 10的OS许可已通过奥林巴斯提供的显微镜控制器认证。因此接受Microsoft许可条款即表示您同意这些条款。有关Microsoft的许可条款,请参阅以下内容。
https://www.microsoft.com/en-us/Useterms/Retail/Windows/10/UseTerms_Retail_Windows_10_english.htm
物镜
系列 | 型号 | 数值孔径(NA) | 工作距离(WD)(mm) |
---|---|---|---|
UIS2?物镜 | MPLFLN2.5x | 0.08 | 10.7 |
MPLFLN5x | 0.15 | 20 | |
专用LEXT物镜(10X) | MPLFLN10xLEXT | 0.3 | 10.4 |
专用LEXT物镜(高性能型) | MPLAPON20xLEXT | 0.6 | 1 |
MPLAPON50xLEXT | 0.95 | 0.35 | |
MPLAPON100xLEXT | 0.95 | 0.35 | |
专用LEXT物镜(长工作距离型) | LMPLFLN20xLEXT | 0.45 | 6.5 |
LMPLFLN50xLEXT | 0.6 | 5.2 | |
LMPLFLN100xLEXT | 0.8 | 3.4 | |
超长工作距离物镜 | SLMPLN20x | 0.25 | 25 |
SLMPLN50x | 0.35 | 18 | |
SLMPLN100x | 0.6 | 7.6 | |
适用于LCD样品的长工作距离物镜 | LCPLFLN20xLCD | 0.45 | 8.3-7.4 |
LCPLFLN50xLCD | 0.7 | 3.0-2.2 | |
LCPLFLN100xLCD | 0.85 | 1.2-0.9 |
应用软件
标准软件 | OLS51-BSW | |||
---|---|---|---|---|
标准软件 | 数据采集app | 分析应用程序(简单分析) | ||
电动载物台套件应用*1 | OLS50-S-MSP | |||
高级分析应用*2 | OLS50-S-AA | |||
薄膜厚度测量应用 | OLS50-S-FT | |||
自动边缘测量应用 | OLS50-S-ED | |||
颗粒物分析应用 | OLS50-S-PA | |||
智能实验管理助手应用 | OLS51-S-ETA | |||
球体/圆柱体表面角度分析应用 | OLS50-S-SA |
*1包括自动拼接数据采集和多区域数据采集功能。
*2包括轮廓分析、差值分析、台阶高度分析、表面分析、面积/体积分析、线粗糙度分析、面粗糙度分析和直方图分析。
奥林巴斯激光显微镜

OLS5100-SAF设置示例
OLS5100-SAF
| ||
OLS5100-EAF
| ||
OLS5100-SMF
| ||
OLS5100-LAF
|