The MX61A is a specially designed semiconductor microscope that allows operators to work in an ergonomically correct position and benefit from smoother operation throughout extended inspection periods, maximizing productivity and integration.
The best in imaging performance has been improved through the introduction of the new UIS2 optical system employed by the MX61A. Clear, crisp, true color images are evident in all illumination techniques including brightfield, darkfield and differential interference contrast (DIC). The MX61A's darkfield observation image brightness has increased by an average of four times as compared with the previous Olympus UIS optical series.
The integrated motorized aperture stop automatically adjusts for the objective lens in use. Thus the best image quality for every magnification is achieved, making routine inspections more comfortable for the eyes and more efficient for the operator.
The MX61A is equipped with an active laser auto focus unit that improves the accuracy and speed of inspections. The introduction of a newly developed multi-spot sensor enables a substantial increase in stability by eliminating the effects of vertical topography on the specimen, exceeds expectations in all observation methods, even faster and more repeatable.
The UIS2 objective lens series provides high performance imaging in deep ultraviolet, visible light and near-infrared microscopy. The MX61A is compatible with all UIS2 objectives making Brightfield, Darkfield, Differential Interference Contrast, Fluorescence and Near-Infrared observations available on one system easily selected through the integrated software platform or handset.
> Click here for details about UIS2 objective lenses
Olympus offers several software platforms that fully integrate with the MX61A microscope frame to control all motorized functions including the digital camera and motorized stage. Each interface is specifically designed for basic inspection and control, advanced image analysis or repetitive site inspection and defect review.
The MX61A is manufactured in accordance to SEMI (Semiconductor Equipment and Materials International) S2 and S8 standards for wafer safety and ergonomics and is also CE marked.
The extensive range of the tilting observation tube allows the operator to sit at the microscope using the proper posture ensuring reliable and comfortable operation.
The rotational speed of the motorized nosepiece ultra-fast, decreasing time between inspections while maintaining clean room compatibility. Olympus offers three variations for desired inspection methods controlled via software, frame button or independent handset.
Olympus has adopted a highly rigid, vibration-sensitive design to its MX61A frame in order to minimize blurring due to vibration, maximizing the image resolution and contrast, beneficial when using 100x or 150x objective lenses.
An ergonomically designed handset allows push-button control for the motorized funtions of the microscope such as selecting the objective lens and observation techniques. The operator can also switch between TRACE and ONE SHOT control of the auto focus unit, manually fine focus, adjust the retardation position in DIC, lamp intensity and lower the stage for sample exchange.
The MX61A frame interfaces seamlessly with the Olympus AL120 wafer handlers. The Olympus wafer loader series transfers both silicon and compound semiconductor wafers of multiple sizes from the cassette to the microscopes stage, while maintaining an ergonomic design. Compliant with both S2 and S8 standards, the AL120 can be programmed for up to ten system configurations including specific cassette types, wafer specifications and transfer speed. Quick push button recipe selection allows the operator to load different products instantly. Non-contact optical centering, notch/flat detection and alignment reduces wafer contact, improving cleanliness.
Continuing with world-renowned performance and reliability of previous Olympus wafer handlers, the AL120 now transfers wafers with thicknesses as small as 90μm to specifically meet the demands of thin wafer manufacturers.
Highly accurate motorized stages are available with the MX61A microscope. Motorized stages with joystick and software controls make inspections repeatable and ergonomic for extended inspection times.
|Optical System||UIS2 Optical System (Infinity-corrected)|
|Microscope Frame > Observation Method||BF/DF/DIC/KPO*/FL|
|Microscope Frame > Reflected/Transmitted||Reflected|
|Microscope Frame > Illuminator||Microscope Frame All-in-one (BF, DF + 1 Option)|
|Microscope Frame > Illumination System > Reflected Light||100 W Halogen/100 W Mercury/75 W Xenon|
|Microscope Frame > Illumination System > Transmitted Light||-|
|Microscope Frame > Focus > Motorized/Manual||Motorized|
|Microscope Frame > Focus > Stroke||25.4 mm|
|Microscope Frame > Focus > Resolution/Fine Adjustment Sensitivity||Resolution 0.01 µm|
|Microscope Frame > Focus > Maximum Specimen Height||24 mm|
|Microscope Frame > Revolving Nosepiece > Motorized Type||
Sextuple for BF/DIC
Quintuple for BF/DF/DIC
Centerable Quintuple for BF/DF/DIC
Sextuple for BF/DF/DIC
|Microscope Frame > Revolving Nosepiece > Manual Type||-|
|Stage > Stroke||
14x12 inch Right Handle Stage:
8x8 inch Right Handle Stage:
|Observation Tube > Widefield (Field Number 22) > Inverted Image||-|
|Observation Tube > Widefield (Field Number 22) > Erect Image||-|
|Observation Tube > Super Wide Field (Field Number 26.5) > Inverted Image||-|
|Observation Tube > Super Wide Field (Field Number 26.5) > Erect Image||Tilting Trinocular Observation Tube|
|Option Unit||Auto Focus/IR Unit/Motorized Stage/Wafer Loader|
|Dimensions||711(W)x853(D)x552(H)mm (in Standard Combination)|
|Weight||56 kg (in Standard Combination)|
|Remark||*Simple Polarized Light Observation|