Metrologia optyczna

KIF-402

High-accuracy Laser Interferometer for Flat Surfaces KIF-402

KIF-402 is Laser Interferometer for Flat Surfaces that is compact, vertical-type interferometer compatible with 4-inch diameters has high performance and low cost.

  1. Compact Size and Easy Operation
    KIF-402 is appropriate for use at production sites thanks to compact and space-saving design. It also allows speedy setting and alignment of a test sample.

  2. 2-stage Switchable Measurement Apertures
    Two-stage magnifications can be toggled in accordance with a hard disk substrate size, thereby enabling measurement of a hard disk surface in full size.

  3. Wide Range of Options
    A variety of ø102 reference lenses (Zygo-mount compatible) are available. Additionally, installation of the interference fringe analyzer (KIF-FU100) allows high-accuracy fringe analysis.

  4. Compatible with Aperture ø152
    The use of an optional aperture converter enables conversion to a 6-inch aperture.

High-accuracy Laser Interferometer for Flat Surfaces KIF-402: Specifications
ItemKIF-402
Measuring methodFizeau type interferometry
Apertureø102 mm (when using the option: ø60 - ø152 mm)
Reference surface accuracy Flat surface: λ/20, λ/30
Measurement apertureø102, ø71 mm (2-stage switching in the unit)
Magnification1X, 1.4X (2-stage switching in the unit)
Light sourceHe-Ne (632.8 nm) laser (laser class 2 product)
Power supply100 VAC, 50/60 Hz
Main unit dimensions300 (W) x 400 (D) x 790 (H) mm
Main unit massApprox. 35 kg
Standard Accessories9-inch video monitor, 2-axis adjustable stage

  • Video printer
  • Vibration isolated table
  • Attenuating filter
  • Transmitted measurement stand
  • Dedicated rack
  • 4 inch-to-6 inch aperture converter
  • Flat mirror (λ/20) for transmitted measurement
  • Reference fringe analyzer (KIF-FU100)
  • Reference lenses (aperture 4 inches, λ/15) (F0.6, F0.7, F0.8, F1.5, F3.0, F6.0)
  • Reference surface (aperture 4 inches, λ/20 or λ/30)
  • Reference surface (aperture 6 inches, λ/15)

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