|High-accuracy Laser Interferometer for Flat Surfaces KIF-402: Specifications|
|Measuring method||Fizeau type interferometry|
|Aperture||ø102 mm (when using the option: ø60 - ø152 mm)|
|Reference surface accuracy||Flat surface: λ/20, λ/30|
|Measurement aperture||ø102, ø71 mm (2-stage switching in the unit)|
|Magnification||1X, 1.4X (2-stage switching in the unit)|
|Light source||He-Ne (632.8 nm) laser (laser class 2 product)|
|Power supply||100 VAC, 50/60 Hz|
|Main unit dimensions||300 (W) x 400 (D) x 790 (H) mm|
|Main unit mass||Approx. 35 kg|
|Standard Accessories||9-inch video monitor, 2-axis adjustable stage|
KIF-402 is Laser Interferometer for Flat Surfaces that is compact, vertical-type interferometer compatible with 4-inch diameters has high performance and low cost.
Compact Size and Easy Operation
KIF-402 is appropriate for use at production sites thanks to compact and space-saving design. It also allows speedy setting and alignment of a test sample.
2-stage Switchable Measurement Apertures
Two-stage magnifications can be toggled in accordance with a hard disk substrate size, thereby enabling measurement of a hard disk surface in full size.
Wide Range of Options
A variety of ø102 reference lenses (Zygo-mount compatible) are available. Additionally, installation of the interference fringe analyzer (KIF-FU100) allows high-accuracy fringe analysis.
Compatible with Aperture ø152
The use of an optional aperture converter enables conversion to a 6-inch aperture.