Inspecting the Power Control Unit

The power control unit (PCU) is a device that controls the electric power used for driving an electric vehicle. Multiple power semiconductors are used inside the PCU. Defects on semiconductor wafers can occur due to degrading manufacturing equipment, inadequate adjustment, human error, or contamination.

Our Solution

The DSX1000 digital microscope is a versatile solution for wafer inspection. With one system, you can select from a range of observation methods to detect defects using low magnification, then identify the defect types using high magnification.

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Semiconductor pattern defects, film unevenness, and line width measurement

Semiconductor pattern dimensions must be measured properly to help ensure proper performance. The OLS5100 laser scanning microscope enables you to measure pattern dimensions easily and precisely.

OLS series laser scanning microscope View Product Details

Measurement of semiconductor wiring pattern width and step