See the Details

Get clear images at high magnification with no complicated sample preparation.

placholder image
1100x magnification

Sample: IC patterns on a semiconductor wafer

See the fine IC patterns and tiny defects on a wafer with sharp detail.

【Sample Application】

Semiconductor bear wafer lasermark

Semiconductor bear wafer lasermark
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Observed sample

Semiconductor wafer

Semiconductor wafer

Switch Observation Techniques with One Click

With a single click, you can change between five observation methods for maximum flexibility.

Darkfield observation

Sample: An IC chip on a UV sensor 

Observe metal parts such as bonding wires and lead frames.

Brightfield observation

Sample: An IC chip on a UV sensor

The IC chip's pattern can be observed with a crisp image.

MIX observation (darkfield + brightfield)

Sample: An IC chip on a UV sensor

The IC chip and metal parts can be viewed at the same time by combining brightfield and darkfield images.

【Sample Application】

Contaminants in Printed circuit board through-holes
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Observed sample

Headlight reflector

UV sensor

3D Images

View your sample in three dimensions from any angle.

Sample: pins on a printed circuit board
View the shape of projecting pins in 3D.

【Sample Application】

Detecting flaws in heat-treated aluminum alloy parts
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Observed sample

Printed circuit board

Printed circuit board

Measure Complex Shapes in Real Time

Using 3D measurement, a DSX microscope can instantly measure complex shapes and points that are difficult to approach. 

Sample: MEMS
Small gaps on the MEMS can be measured from any direction in real time.

【Sample Application】

Sectioning analysis for ball grid array
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Observed sample

MEMS

MEMS

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