The microscope's scanning algorithm delivers improved data quality and greater speed to reduce the scan time and streamline your workflow, resulting in better productivity. |
VLSI Standard 80 nm height sample (MPLFLN10XLEXT) | The OLS5000 microscope incorporates a PEAK algorithm for 3D data construction. This algorithm provides highly accurate data from low to high magnifications and reduces the data acquisition time. |
When measuring the shape of steps on a sample containing near-vertical planes, such as an electronic component or MEMS, the data acquisition time can be reduced by limiting the Z-direction scanning range.
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The information on this page, including the accuracy guarantee, is based on conditions set by Olympus.