The AL120-12 wafer handler is compatible with both FOUP (Load Port) and FOSB, ideal for lower cost back-end inspection. The safe and ergonomic design maintains operator safety while effectively transferring wafers including thin and warped wafers.
Ergonomic and Easy to Operate
- With post-process inspection in mind, particular emphasis has been placed on the ease of use and ergonomics. The AL120-12 system includes top macro, back macro and microscope inspection.
- The robotic vacuum pick-up arm provides non-contact centering of wafer for accurate placement on the microscope stage. Wafers can be rotated 360 degrees during microscope inspection.
- The AL120-12 interfaces with Olympus ' MX61L microscope providing excellent resolution and precision quality optical imaging.
- Centrally located controls and on-board macro illuminator allow operators to maintain an ergonomic and relaxed position, even for long periods of inspection.
Robust, Reliable and Safe Handling
- Olympus continues with their proven expertise in wafer handling with the AL120-12 model. Its robust and reliable design maintains wafer integrity and ensures safe handling for 300mm wafers.
- Transfer of thin and warped wafers can be safely transferred using the AL120-12 handler.
