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Microscope Solutions for
Semiconductor Manufacturing

Slicing and Polishing

Slice the ingot into thin silicon plates (wafers). Polish the top and bottom of the wafer surfaces. This flattens the surface so the circuit patterns can be imprinted. The polished wafer is then marked with laser marking equipment.

Inspecting the Surface Roughness of a Wafer

The wafer’s surface must be properly flattened to imprint precise IC patterns on it. As a result, detailed inspections of the surface roughness are required after polishing.

Our Solution

Our OLS series microscopes can show the surface roughness conditions of a wafer in fine detail after the surface polishing step. It can also measure the surface roughness at both the micro and nano level.

OLS series laser scanning microscope

OLS series laser scanning microscope

Surface roughness of a wafer

Surface roughness of a wafer

Application Notes

Explore related applications:

Step Measurement of Transparent Film Applied to a Glass Surface
Step Measurement of Transparent Film Applied to a Glass Surface Read More
Measuring the Thickness of Photoresist Film
Measuring the Thickness of Photoresist Film Read More

Confirm the Dimensions of the Water Mark

Each wafer has an identifying mark imprinted by a laser. As the size of the laser mark continues to become smaller (micron level), operators need precise inspection equipment that can measure its small dimensions.

Our Solution

Our OLS series microscope can finely represent the surface roughness conditions of a wafer after the surface polishing. It can measure surface roughness at both the micro and nano level.

OLS series laser scanning microscope

OLS series laser scanning microscope

Laser mark overview

Laser mark overview

Laser mark cross section

Laser mark cross section

Application Notes

Explore related applications:

Circuit Pattern Inspection on Wafer Samples
Circuit Pattern Inspection on Wafer Samples Read More
Inspection in the MEMS Manufacturing Process/3D shape measurement of a micron sized area using a laser microscope
Inspection in the MEMS Manufacturing Process/3D Shape Measurement of a Micron-Sized Area using a Laser Microscope Read More
Shape Evaluation of a Marking Stamped on a Metal Surface / 3D shape measurement using a laser microscope
Shape Evaluation of a Marking Stamped on a Metal Surface / 3D Shape Measurement using a Laser Microscope Read More
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