Olympus has its own optical scanner.

New MEMS scanner performs accurate X-Y scanning with low scan trace distortion and minimal optical aberrations. While some laser microscope cennot avoid fluctuations in measurements of peripheral areas, the OLS5000 microscope obtains uniform results regardless of whether the center or periphery of the visual field is being measured.

Proximal Galvano structure

2-axis integrated structure

Conventional laser microscope (Proximal Galvano structure)

OLS5000 microscope (2-axis integrated structure)