Industrial Microscopes
Precise imaging

High-resolution, precise imaging

With the capability to make accurate 3D measurements on a wide range of sample types, the system delivers reliable data for quality assurance and process control.


Excellent lateral resolution

Excellent Lateral Resolution

The 405 nm violet laser and dedicated high-NA objectives make it possible to capture fine patterns and defects that conventional optical microscopes, white-light interferometers, or red laser-based microscopes are unable to detect.

Red type

Violet type

Red type (658 nm: 0.26 μm line & space)

Violet type (405 nm: 0.12 μm line & space)


Uniform measurement values

Dedicated LEXT objectives can accurately measure peripheral areas that would otherwise get distorted.

Uniform measurement values


Conventional objectives

Conventional objectives


LEXT objectives

LEXT objectives


Newly developed MEMS Scanner

Newly developed MEMS Scanner

New MEMS scanner performs accurate X-Y scanning with low scan trace distortion and minimal optical aberrations.


4K scan technology

4K Scan Technology

The 4K scan technology scans 4,096 pixels — four times more than our previous model — in the X-axis direction.
The OLS5000 microscope can detect slopes that are almost vertical as well as very low steps without image correction. 


Capturing the true shape

Capturing the true shape

Because conventional laser microscopes use standard image processing techniques such as smoothing to eliminate noise, they sometimes lose accurately measured fine height irregularities along with the noise.
The OLS5000 microscope employs Olympus’ Smart Judge algorithm to automatically detect only reliable data, facilitating accurate measurements without losing fine height irregularity data. 


Other high-resolution measurement technologies

  • PEAK algorithm
  • Dual confocal system
  • Sq noise (measuring noise) guarantee
  • Accuracy and repeatability are guaranteed
  • Hybrid matching algorithm
  • Hybrid dampening mechanism
  • HDR scan

Download the Brochure

The information on this page, including the accuracy guarantee, is based on conditions set by Olympus.

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