With the capability to make accurate 3D measurements on a wide range of sample types, the system delivers reliable data for quality assurance and process control.
The 405 nm violet laser and dedicated high-NA objectives make it possible to capture fine patterns and defects that conventional optical microscopes, white-light interferometers, or red laser-based microscopes are unable to detect. | ||
Red type (658 nm: 0.26 μm line & space) | Violet type (405 nm: 0.12 μm line & space) |
Dedicated LEXT objectives can accurately measure peripheral areas that would otherwise get distorted. | |
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New MEMS scanner performs accurate X-Y scanning with low scan trace distortion and minimal optical aberrations. |
The 4K scan technology scans 4,096 pixels — four times more than our previous model — in the X-axis direction. |
Because conventional laser microscopes use standard image processing techniques such as smoothing to eliminate noise, they sometimes lose accurately measured fine height irregularities along with the noise. |
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The information on this page, including the accuracy guarantee, is based on conditions set by Olympus.