The Olympus LEXT® OLS5100 laser confocal scanning microscope
can help you simplify your testing and measurement workflow
with smart, easy-to-use features and highly accurate measurement data.
Equipped with dedicated LEXT objectives designed for surface metrology,
the OLS5100 laser microscope can detect a step height difference
as small as six nanometers for highly accurate measurements.
The MEMS scanner enables the system to scan through surfaces at high resolution.
For better image quality, 4K lateral scanning is the default scanning mode.
Even when resolving structures as small as 120 nm, you will still get clear images.
The system’s precision measurements are balanced with speed.
With the PEAK algorithm, the OLS5100 laser microscope
can collect data in the tens of microns range in just a few seconds.
For even faster results, SKIP SCAN mode enables the system
to measure a one-millimeter step height difference in just twenty seconds.
Operating the system is easy.
You can capture 3D data automatically just by clicking the “Start” button.
The Smart Scan function will automatically optimize the imaging settings,
helping minimize variation between different operators.
Analyzing data is also easy.
With just a few clicks, the software can quickly quantify surface topography,
including the step height, line width, and surface roughness.
For even greater efficiency, the system’s Experiment Total Assist
enables you to rapidly perform a series of measurement tasks,
such as setting up samples and measurement conditions
and managing measurement results.
You can also visualize trends in the measurement data
according to your experiment plan, enabling you to reduce your operation time
by as much as 30% compared to the conventional method.
Elevate your surface metrology to a higher level
with the LEXT OLS5100 3D laser confocal scanning microscope.
Experience the accuracy, ease of use, and efficiency
of the LEXT OLS5100 laser microscope for yourself.
To learn more, visit olympus-ims.com
or contact your local sales representative.