The AL120-12 wafer handler is compatible with both FOUP (Load Port) and FOSB, ideal for lower cost back-end inspection. The safe and ergonomic design maintains operator safety while effectively transferring wafers including thin and warped wafers.
Ergonomic and Easy to Operate
With post-process inspection in mind, particular emphasis has been placed on the ease of use and ergonomics. The AL120-12 system includes top macro, back macro and microscope inspection.
The robotic vacuum pick-up arm provides non-contact centering of wafer for accurate placement on the microscope stage. Wafers can be rotated 360 degrees during microscope inspection.
The AL120-12 interfaces with Olympus ' MX61L microscope providing excellent resolution and precision quality optical imaging.
Centrally located controls and on-board macro illuminator allow operators to maintain an ergonomic and relaxed position, even for long periods of inspection.
Robust, Reliable and Safe Handling
Olympus continues with their proven expertise in wafer handling with the AL120-12 model. Its robust and reliable design maintains wafer integrity and ensures safe handling for 300mm wafers.
Transfer of thin and warped wafers can be safely transferred using the AL120-12 handler.
Specifikace
300mm Wafer Loader AL120-12 Specifications
AL120-LMB12-LP3
AL120-LMB12-F
Wafer Size
300 mm in dia. (SEMI M1.15, t=775 µm) Option: 200 mm in dia.