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TM3000

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This new generation fully automated table top SEM with its ground breaking 30,000X magnification, superior depth of field, ease of use, compact size and affordability makes it the perfect compliment to a light microscope.

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The TM3000 TableTop Microscope continues the phenomenal global success of the orginal TM-1000 and pushes the boundaries of Tabletop Electron Microscopy even further.

TM3000 remains the simplest TableTop Microscope to use, with an easy, intuitive Graphical User Interface (GUI). No special sample preparation such as coating with metal films is required for hydrated, oily or non-conducting samples, and it is easy to use like a digital camera.

This enables all researchers, even those new to Electron Microscopy (EM), to image their samples and to obtain high quality, high resolution images within minutes.

The TM3000 TableTop Microscope has been developed to cover the widest range of academic and industrial applications and research:

Life Sciences
Polymer Sciences
Materials Research
Food Sciences
Cosmetics
Healthcare
Pharmaceutical
Textiles
Semiconductor
Education

Features

Higher magnification range (up to 30x000x compared to 10,000x with the previous TM-1000) allows more detailed investigations, with preserving the wide field imaging ability (15x)
New Image Shift functionality (ｱ50ｵm) allows ease of navigation around your sample at high magnification
Better resolution gives sharper, clearer images containing much more details
Improved depth of field (>1mm) means that more of the sample is in focus, allowing surface morphology to be seen in stereoscopic details
Images contain compositional and topographical information. The annular multi-segmented detector used in the TM3000 shows contrast due to different average atomic numbers of materials in the specimen, and also topographical (shape) details of the sample
Larger samples (70mm x 50mm) can be loaded and investigated with the extended stage movement range (35mm in X and Y)
Simple to use. Auto-start, Auto-focus, Auto-brightness and Auto-contrast make it a "see shoot" system.
Digital imaging. All images saved on the computer for easy access.
Built-in measurement functions allow dimensional information to be acquired quickly and easily
Dual accelerating voltages (5kV and 15kV) provide greater flexibility in imaging and analysis of your samples: - 5kV enhances the surface structure and optimizes imaging on "soft" materials
-15kV allows high-resolution topographical and / or compositional imaging.
Furthermore, when TM3000 is equipped with the optional EDS package, 15kV support comprehensive EDS analysis of your sample, producing elemental compostional mapping data with automatic reporting.

Standard Specifications
Basic Specifications
Magnification		15～30,000x（Digital zoom：×2,×4）
		（Minimum magnification is subject to change depending upon the observation condition, distance between sample and detector, and monitor size）
Electron Optics
Electron beam source		Pre-centered Cartridge filament
Acceleration voltage		5kV，15kV, Analysis
Condenser lens		Permanent magnet lens + Electromagnetic lens
Objective lens		Electromagnetic lens
Astigmatism correction coil		Octa-pole electromagnetic coil, XY method
Scanning coil		Double deflection electromagnetic coil
Image shift		more than ±50μm（D=4.5mm、observation mode ：normal mode）
Detector		High sensitive four segments semiconductor BSE detector
Image variety		BSE image (Standard (COMPO), shadow1, shadow2, TOPO)
Specimen Stage
Traverse		X-axis ±35 mm, Y-axis ±35 mm
Maximum sample size for whole area observation		35 mm x 35 mm
Maximum specimen size		70 mm diameter
Maximum specimen height		50 mm height （D=4.5mm）
Evacuation system
Vacuum control		fully automated electromagnetic valve type
Vacuum gauge		Pirani gauge
Vacuum time		Less than three minutes from atmosphere pressure to be EVAC ramp on
Specimen chamber pressure		Standard mode, Charge-up reduction mode
Vacuum pump	Turbo molecular pump（TMP）	30 ｌ/s
	Diaphragm pump（DFP）	1 m3/h
Display
Operating method		Graphic User Interface(GUI)，Japanese/English switchable
		OS Microsoft(R) Windows(R) ７ Professional/Home Premium
Operation		Mouse，Key board
Scanning mode（Scan speed）		Scan for searching the field of view（1s/ frame）
		Image confirmation（10s/ frame）
		Image adjustment（0.25s/ frame）
		Frozen frame
		Simplified save
		Scan mode for save（40s/ frame）
Auto image adjustment function		Auto Start(Filament auto-heating＋Auto-brightness＋Auto-focus)
Image data save
Frame memory		640×480 pixel （Simplified save）, 1280×960 pixel（save）
Image format		BMP、TIFF、JPG
Other function		Raster rotation
		Magnification preset (two steps)
		Data display（Micron marker, micron value, magnification, date and time, Image No., D, comments, Image mode, Observation condition)
		Digital zoom（×2、×4）
safety device		Protection against over current, built-in ground-fault circuit interrupter
Dimensions and weight
Main unit		330 (W)×606 (D)×565 (H) mm，63.0 kg
Diaphragm-pump		145 (W)×256 (D)×217 (H) mm，4.5 kg

EDS X-ray *

Bruker QUANTAX 70

Qualitative elemental analysis presented as atomic or weight %
ESPRIT HyperMap ・Ultra-fast spectral imaging with position-tagged spectrometry for elemental mapping
Detection range from Boron (B) to Americium (Am) including light elements
Energy resolution 135 eV @ Na Ka
Silicon drift detector with large active area 30mm

A range of Deben accessories to enhance the capabilities of the Hitachi TM3000

XY Motorixed stage
Tilt & Rotate sub-stage with chamber camera
Peltier Cooling stage
Tensile stage

3D-VIEW Software

Full-fledged three-dimensional images can be obtained with ease
Three-dimensional images can be rotated or zoomed in by mouse control.
Three-dimensional images are acquired without tilting the sample by utilizing the 4-quadrant backscatter detector
Distance in height between 2 points and simple surface roughness can be measured from sectional profile.
Three-dimensional image screen can be recorded in animation AVI, which is a powerful tool to present the shape of a sample.

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