
The Olympus MX51 industrial inspection microscope is cost-effective and optimized for the inspection requirements of a variety of electronic components, wafers and large samples.
Frontal Operation |
The controls of the MX51 are positioned at the front of the microscope, easy for the operator to access and manipulate. The built-in clutch of the 150mm stage enables quick stage positioning, reducing operator fatigue. |
Motorized Revolving Nosepiece |
In addition to the wide range of standard manual nosepieces, the MX51 can be equipped with a range of motorized nosepieces. The motorized nosepiece provides faster exchange between objective lenses and remote control reducing potential contamination to the sample. The controller for the nosepiece can interface with the Olympus Stream Software which so objective magnifications can be automatically stored while capturing an image. |
The objective is the core part of the optical microscope, used for the illumination and observation of material science samples. Olympus has the widest choice of objectives, universal objectives suitable for all contrast methods, long and ultra long working distance objectives, near-infrared objectives, LCD inspection objectives and many more.
| Example Observation Images | |||
Brightfield |
Darkfield |
DIC |
Fluorescence |
| Diverse Lineup Allows Selections According to the Purpose | |
| MPLAPON | Plan Apochromat Objective Lens Series |
| MPLFLN | Semi Apochromat Objective Lens Series for Brightfield |
| MPLFLN-BD | Semi Apochromat Objective Lens Series for Brightfield and Darkfield |
| MPLFLN-BDP | Semi Apochromat Objective Lens Series for Brightfield and Darkfield |
| LMPLFLN | Long WD Semi Apochromat Objective Lens Series for Brightfield |
| LMPLFLN-BD | Long WD Semi Apochromat Objective Lens Series for Brightfield and Darkfield |
| MPLN | Plan Achromat Objective Lens Series for Brightfield |
| MPLN-BD | Plan Achromat Objective Lens Series for both Brightfield and Darkfield |
| SLMPLN | Super Long WD Plan Achromat Objective Lens Series |
| LCPLFLN-LCD | Long WD Semi Apocromatic Objective Lens Series for LCD |
> Click here for details about UIS2 objective lenses
Olympus offers a wide range of imaging and analysis solutions including a variety of digital cameras as well as software. Our most advanced software, integrates with the Olympus MX51 and performs mission-critical tasks such as image acquisition, specialized image processing, measurement functions, statistical outputs, annotation, archiving, report generation and database management including an optional Secure File Repository for added security.
> Click here for Olympus' lineup of digital cameras
The specially designed IR objective lenses and components are ideal for imaging features and defects beneath the surface of silicon and glass. The Semiconductor and Photovoltaic industries use IR imaging for alignment, identification of sub-surface contamination and critical dimension inspections. The 20x, 50x and 100x objectives are designed with a correction collar that corrects for the aberrations caused by the thickness of silicon and glass, improving overall contrast. Olympus supports several IR digital cameras for near infrared imaging and analysis.
Near-infrared Components |
Near-infrared Observation |
The MX51 can be equipped with fluorescence observation by adding a mirror cube and high intensity light source. Fluorescence observation is ideal for easy detection of resist residuals and organic particles.
Fluorescence Mirror Cubes |
Fluorescence Observation |
Transmitted Light Module |
Transmitted light can be added to the MX51 for photo-mask or flat panel display inspections. Two types are available, one with a universal condenser and a second type with a high numerical aperture. Both support simple polarized light. |
| Industrial Inspection Microscope MX51 Specifications | |||
| Optical System | UIS2 Optical System (Infinity-corrected) | ||
| Microscope Frame | Observation Method | BF/DF/DIC/KPO*/FL | |
| Reflected/Transmitted | Reflected/Transmitted | ||
| Illuminator | Reflected Illuminator for BF/DF(BF/DF/DIC/KPO*) | ||
| Universal Reflected Illuminator (BF/DF/DIC/KPO*/FL) | |||
| Illumination System | Reflected Light | 100 W Halogen/100 W Mercury/75 W Xenon | |
| Transmitted Light | Fiber Light Guide | ||
| Focus | Motorized/Manual | Manual | |
| Stroke | 32 mm | ||
| Resolution/Fine Adjustment Sensitivity | Fine Stroke per Rotation 0.1 mm | ||
| Maximum Specimen Height | 30 mm | ||
| Revolving Nosepiece | Motorized Type | Sextuple for BF/DIC | |
| Quintuple for BF/DF/DIC | |||
| Centerable Quintuple for BF/DF/DIC | |||
| Sextuple for BF/DF/DIC | |||
| Manual Type | Quintuple for BF | ||
| Sextuple for BF/DIC | |||
| Centerable Sextuple for BF/DIC | |||
| Septipule for BF/DIC | |||
| Quintuple for BF/DF | |||
| Quintuple for BF/DF/DIC | |||
| Centerable Quintuple for BF/DF/DIC | |||
| Sextuple for BF/DF/DIC | |||
| Stage | Stroke | 6x6 inch Right Handle Stage: 158(X)x158(Y)mm (Transmitted Light Range 100x100 mm) | |
| 4x4 inch Coaxial Left (Right) Handle Stage: 100(X)x105(Y)mm (Transmitted Light Range 96x96 mm) | |||
| Observation Tube | Widefield (Field Number 22) | Inverted Image | Binocular /Trinocular /Tilting Binocular Observation Tube |
| Erect Image | Trinocular /Tilting Trinocular Observation Tube | ||
| Super Wide Field (Field Number 26.5) | Inverted Image | Trinocular Observation Tube | |
| Erect Image | Trinocular/Tilting Trinocular Observation Tube | ||
| Option Unit | DUV Unit/IR Unit/Wafer Loader | ||
| Dimensions | 430(W)x591(D)x495(H)mm (in Standard Combination) | ||
| Weight | 26 kg (in Standard Combination) | ||
| Remark | *Simple Polarized Light Observation | ||
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