Semiconductor & Flat Panel Display Inspection Microscopes

Olympus MX microscopes are developed with the concept to offer the highest efficiency for all our customers. MX microscopes ensure beneficial four levels, Fast start-up, Easy Operation, Failure analysis and expandability for users.

MX61A

The MX61A is a specially designed semiconductor microscope that allows operators to work in an ergonomically correct position and benefit from smoother operation throughout extended inspection periods, maximizing productivity and integration.

MX61L/ MX61

The MX61L/ MX61, 300 mm/ 200 mm semiconductor inspection microscope provides exceptional image resolution and clarity through observation methods such as brightfield, darkfield, differential interference contrast (DIC), fluorescence and infrared.

MX51

The Olympus MX51 industrial inspection microscope is cost-effective and optimized for the inspection requirements of a variety of electronic components, wafers and large samples.

MX-IRP Inspection and Defect

The NEW Olympus Inspection and Defect Review Software is a cost-effective and fully integrated tabletop solution, capable of pre-programmed inspection and defect review for the microelectronics industry.

MX-IR/BX-IR

These IR Imaging Systems contain dedicated IR objective lenses and components that are corrected for chromatic aberrations and designed for 700-1300 nm wavelengths.

AL120-12

The AL120-12 wafer handler is compatible with both FOUP (Load Port) and FOSB, ideal for lower cost back-end inspection. The safe and ergonomic design maintain operator safety while effectively transferring wafers including thin and warped wafers.

AL120

The AL120 wafer handler series transfers both silicon and compound semiconductor wafers from the cassette to the microscope stage with enhanced capabilities and flexibility, while maintaining an ergonomic design.