|Interference Fringe Analyzer KIF-FU60/FU100, Interference Fringe Analysis Software KIF-FSA: Specifications|
|Analysis method||Fringe scanning method|
|Measured fringe requirement||Interference fringe with sinusoidal strength distribution (analysis of multiple interference fringes is not possible)|
|Display image size of interference fringes||640 x 470 pixels|
PV value: 0.01 λ (2σ) or less
RMS value: 0.003 λ (2σ) or less
|Analysis functions||Analysis and display of PV, Rms, Pwr, As, Coma, Sa3 and Zernike coefficient|
|OK/NG judgment function||Standard value setting and OK/NG result display for PV, Rms, Pwr, As, Coma, Sa3, etc.|
|3-axis piezo stage stroke (option)||
Coarse: ±3 mm (X, Y and Z axes)
Fine: 12 μm (X, Y and Z axes)
Level place with minimum vibration (floor vibration: ±0.8 m/s2 or less)
60% or less, with no condensation
* The system may not exert sufficient performance depending on the installation environment during measurement.
* This system shall not guarantee absolute accuracy in conformity with the traceability system.
Work parameters setup functions
・ Product name, unit name, comment
・ Fitting order (3/4/9/16/25/36)
・ Aberration elimination (aberration specification/Zernike coefficient specification)
・ Display units (λ, μm, nm, fringe)
・ Offset setting for Zernike coefficients
・Rated values (each aberration specification and user-defined expression)
Analysis result display functions
・ P-V, RMS, Pwr
・ Seidel aberrations (tilt, focus, astigmatism, coma, spherical aberration)
・ Zernike coefficients (3, 4, 9, 16, 25, 36 terms)
・ 3D bird's-eye view, 2D color map
・ Cross-section profile (X-direction, Y-direction, PV, RMS)
・ OK/NG judgment result
File input/output functions
・ Save/read of work parameters
・ Save/read of fringe data
・ Save/read of mask data
・ Save/read of screen layouts
・ Main window printing
KIF-FU60/KIF-FU100 and the software KIF-FSA are interference fringe analysis system for acquiring the wavefront phase of a test piece by a fringe scanning method and displaying and saving the measurement result. KIF-FU60 is mounted on the KIF-20 series interferometer and KIF-FU100 is mounted on the 4-inch interferometer.
The system achieves a space-saving design through the adoption of a piezoelectric controller developed by Olympus and a laptop PC.
Improvement in measurement speed
The improvement of image data capturing and analysis algorism has reduced measurement speed.
High-functionality analysis software
The analysis software, including the automatic alignment function, has been completely changed to meet exact customer needs.
Digital zoom function
The digital zoom function, which can vary magnification from 1X to 3X in 0.1X steps, allows easy check of even a small workpiece.
2D & 3D color image display
The wavefront phase and cross-section profile of a test piece can be checked using its 2D color image display. Additionally, a 3D image can visually represent a wavefront phase.
OK/NG judgment function
OK/NG judgment can easily be performed on the production line by setting a standard value. The standard value for a user-defined aberration can also be set.
The screen layout condition save/read function allows layout configuration in conformity to the usage environment and product.