High Resolution & High Contrast

This specially designed module provides bright and high contrast deep ultraviolet real time images for detailed semiconductor and nano-fabrication inspections

The optical system optimized for 248 nm provides resolutions down to 80nm, two times better than that available with the visible light. The 248 ±4nm imaging band is corrected to prevent chromatic aberrations. This technique makes it possible to observe both high-contrast and high-resolution features without preprocessing. Common applications for DUV observation include detailed inspections of semiconductor patterns, gap and pole identification on magnetic heads, and microlithography.

Deep Ultraviolet Observation

Visible Light Observation

Newly designed robust DUV Objective Lens

DUV Objective Lens

The DUV lens is specially designed with a unique "non-cemented" technology to prevent deterioration found in other DUV lenses, making it an ideal solution for long-term use.

Modular Design

Increased Flexibility and Safety through an External Lamphouse

Deep Ultraviolet Observation Module

The modularity of the DUV system not only allows for integration with the Olympus MX and BX series of microscopes, but allows the mercury-xenon power supply to be independent of the microscope and directs the illumination to the DUV module via a UV light guide. The shutter design employed protects the operator by directing the illumination to the DUV objective lens and camera only. In addition, since the light source is set apart from the microscope and the intensity can be independently controlled to the optimum level, heat transition to the sample is minimized.

Real Time Imaging

The high resolution DUV digital camera is software controlled and capable of high-speed data acquisition. Images captured on the computer can be quickly documented and analyzed for easy storage in a database and report generation.

Economical and Efficient

Light Weight and Compact

The DUV intermediate tube is simple with no moving parts or external control; this allows the tube to be half the size and weight of conventional DUV microscope systems.

Efficient Mercury Xenon Lamp

Lamphouse and Power Supply

A long-life mercury xenon lamp is used to power the DUV module. Its average lifetime is >1000 hours, thus reducing operating costs and minimizing lamp replacements.

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Integration of Deep Ultraviolet optical units with a compatible microscope frame enables a DUV observation microscope. For the detail of compatible microscopes, refer to the Specification of each microscope.

Deep-ultraviolet Observation Units

List of Compatible Microscopes

> MX61A: Motorized Model Compatible with 300mm Wafers while Enabling Integrated Control over Peripheral Devices
> MX61L/ MX61: Motorized Model Compatible with 300 mm/ 200 mm Wafers
> MX51: Manual Model Compatible with 150mm Wafers