Near-Infrared Micro-Spectrophotometer

■ Reflectivity, Film thickness, Object color, and transmittance measured in seconds
■ Wide range of wavelength from 380 to 1050 nm
■ Measures reflectivity on curved surface without contact

Measure Reflectivity

Measure the reflectivity of a minute area with a diameter ranging from 17 to 70 um

Optical Path of Reflectivity Measurement
Example of reflectivity measurement : lens	Example of reflectivity measurement : lens curvature

Measure Film Thickness

Film Thickness Measurement Screen-shot

Use reflectivity data to measure the thickness of single-layer or multi-layer films of approximately 50 nm to 10 μm.

Measure Object Color

Object Color Measurement Screen-shot

Display an XY chromaticity diagram, an L*a*b* chromaticity diagram, and their related numeric values based on reflectivity data.

Measure Transmission Levels　(Available as an option)

Measure the transmittance of a plane sample by transmitting 2 mm parallel beams of lights through the sample to the spectrophotometry acceptance elements.

Optical Path of Transmittance Measurement

Measure Reflectivity at an Incidence Angle of 45 Degrees（Available as an option）

Measure the reflectivity at an incidence angle of 45 degrees by reflecting 2 mm parallel beams of lights to the spectrophotometry acceptance elements.

Optical Path of 45-degree Reflectivity Measurement

Fast Measurements of Curves Surfaces and Minute Areas

Provides High-speed Measurement

Optical system image

Quick, high repeatability measurements can be achieved in seconds using a flat field grating, line sensor and high-speed spectrophotometry.

Optimally Suited for Reflectivity Measurement of Extremely Small Parts and Lenses

Image of reflectivity measurment

Olympus has designed a new dedicated objective lens that provides non-contact measurements across an area of 17 to 70 μm diameters. The new lens provides high repeatability on even curved surfaces or minute electronic parts.

Anti-reflection Processing is Not Required on the Back of the Sample

Principle of backside reflection elimination

Accurate measurement of surface reflectivity can be performed without the costly steps needed to prevent rear surface reflection. Rear surface-reflected light is reduced by means of special optics that block all out-of-focus light reflection similar to a confocal system. Whether your optical component is spherical,aspherical or flat, the USPM-RU-W does not require sample preparation through anti-reflection treatments.

Available Film Thickness Measurement Methods

The single-layer or multi-layer film thickness can be analyzed according to the measured spectral reflectivity data. You can select the optimum measurement method for the application.

Peak-valley Method

Peak valley film thickness analysis result

This method is used to calculate film thickness based on the periods between the peaks and valleys of the measured spectral reflectivity value, and is effective for measuring single-layer film. No complicated settings are required, so measuring film thickness is easy.

Fourier Transform Method

Fourier transform film thickness analysis result

This method is used to calculate film thickness based on the periods between measured spectral reflectivity values, and is effective for measuring single-layer and multilayer films. The Fourier transform method eliminates noise, thus making analysis possible when it is difficult to detect peak and valley values.

Curve Fit Method

Curve fitting film thickness analysis result

This method is used to calculate film thickness by estimating which structure has the smallest difference between the measured spectral reflectivity and the calculated reflectivity for that structure, and is effective for measuring single-layer and multilayer films. The curve fit method also makes it possible to analyze thin film in which peak and valley values are not apparent.

Diverse application

Satisfies Diverse Measurement Needs at High Speed and With High Precision

Evaluation of Lens Coating for reflectivity,color and film thickness.

Mobile Phone Camera Lenses Projector Lenses Digital Camera Lenses Spectacle Lenses

Examining the Reflectivity and Film Thickness of Minute Electronic Parts.

LED Packages Printed Circuit Boards

Reflectivity, Film Thickness and Transmittance measurment of Planar Optical Elements.

LCD color filters Optical films

Optical Elements Reflectivity at an Incident Angle of 45 Degrees.

Prisms Mirrors

*1 Optional unit *2 Measured under the measurement conditions of our company. *3 The total combined weight of both the installed transmissivity measurement

*4　Spot diameter

Spectral Analysis Software with an Easy-to-use User Interface

Easy-to-understand Display

Eample of GUI layout

Change the layout and position, size, and visibility of each window according to the measurement purpose and user needs.

Diverse Measurement Results

Reflectivity/transmittance graph, reflectivity/transmittance text, XY/L*a*b* chromaticity diagram

Spectral reflectivity/transmissivity graphs and text, color measurement (XY and L*a*b* chromaticity diagrams), and film thickness measurement values can be displayed on one screen for easy understanding.

Easy Position Adjustment and Focus Adjustment

Positioning the measuring point is easy by using a focusing window for Z axis alignment and centering (CT) window for X and Y axis alignment.

Focus

Position Adjustment

Flexibility for Any Application

Work setting, layer setting, graph setting, parameter setting

The USPM-RU-W software can be configured to achieve optimum performance for your specific sample.

Tolerance setting function of automatic pass / fail determination.

Example of reflectivity measurement with Tolerance setting function

System can be configured to provide good / no good designations automatically.